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1

Sub nm-Resolution Static Measurement with MEMS Displacement Sensors

Vencislav Todorov, Vladimir Stavrov, Johann Kreuter

Journal:

Procedia Engineering

Year:

2011

Language:

english

File:

PDF, 450 KB

english, 2011

2

[IEEE 2007 30th International Spring Seminar on Electronics Technology - Cluj-Napoca, Romania (2007.5.9-2007.5.13)] 2007 30th International Spring Seminar on Electronics Technology (ISSE) - Novel MEMS Piezoresistive Sensor Array Cell

Stavrov, Vladimir, Tomerov, Emil, Stavreva, Galina, Tsenev, Valentin, Philippov, Philip

Year:

2007

Language:

english

File:

PDF, 1.20 MB

english, 2007

3

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - All-silicon microforce sensor for bio applications

Stavrov, Vladimir T., Shulev, Assen A., Hardalov, Chavdar M., Todorov, Vencislav M., Roussev, Ilia R., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika

Year:

2013

Language:

english

File:

PDF, 702 KB

english, 2013

4

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - MEMS sensors for mm-range displacement measurements with sub-nm resolution

Stavrov, Vladimir T., Todorov, Vencislav M., Shulev, Assen A., Hardalov, Chavdar M., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika

Year:

2013

Language:

english

File:

PDF, 1.26 MB

english, 2013

5

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Piezoresistive position microsensors with ppm-accuracy

Sánchez-Rojas, José Luis, Brama, Riccardo, Stavrov, Vladimir, Shulev, Assen, Stavreva, Galina, Todorov, Vencislav

Year:

2015

Language:

english

File:

PDF, 573 KB

english, 2015

6

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Force monitoring transducers with more than 100,000 scale intervals

Sánchez-Rojas, José Luis, Brama, Riccardo, Stavrov, Vladimir, Shulev, Assen, Chakarov, Dimiter, Stavreva, Galina

Year:

2015

Language:

english

File:

PDF, 350 KB

english, 2015

7

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Measurement of the 1/f noise of lateral actuated MEMS with sidewall piezoresistors

Stavrov, Vladimir, Kohl, Franz, Sauter, Thilo, Philipov, Philip, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika

Year:

2013

Language:

english

File:

PDF, 507 KB

english, 2013

8

Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

Stavrov, Vladimir, Chakarov, Dimitar, Shulev, Assen, Tsveov, Mihail

Journal:

Journal of Theoretical and Applied Mechanics

Year:

2016

File:

PDF, 111 KB

2016

9

Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers

Dukic, Maja, Winhold, Marcel, Schwalb, Christian H., Adams, Jonathan D., Stavrov, Vladimir, Huth, Michael, Fantner, Georg E.

Journal:

Nature Communications

Year:

2016

Language:

english

File:

PDF, 1.14 MB

english, 2016

10

[IEEE 2017 40th International Spring Seminar on Electronics Technology (ISSE) - Sofia, Bulgaria (2017.5.10-2017.5.14)] 2017 40th International Spring Seminar on Electronics Technology (ISSE) - Self-sensing cantilevers with nano-laminated Dielectric-Metal-Dielectric resistors

Stavrov, Vladimir, Stavreva, Galina, Tomerov, Emil, Dikov, Hristozko, Vitanov, Petko

Year:

2017

Language:

english

File:

PDF, 624 KB

english, 2017

11

[IEEE 2017 40th International Spring Seminar on Electronics Technology (ISSE) - Sofia, Bulgaria (2017.5.10-2017.5.14)] 2017 40th International Spring Seminar on Electronics Technology (ISSE) - In-line thickness control of self-sensing cantilevers for advanced AFM applications

Stavrov, Vladimir, Stavreva, Galina, Tomerov, Emil, Todorov, Vencislav, Buchvarov, Ivan

Year:

2017

Language:

english

File:

PDF, 929 KB

english, 2017